Title | Tailoring the nonlinear response of MEMS resonators using shape optimization |
Publication Type | Journal Article |
Year of Publication | 2017 |
Authors | Shaw SW, Li LL, Turner KL, Shoshani O, Dou S, Jensen JS, B. Strachan S, Polunin PM |
Journal | APPLIED PHYSICS LETTERS |
Volume | 110 |
Date Published | FEB 20 |