Mathematical modeling, experimental validation and observer design for a capacitively actuated microcantilever

TitleMathematical modeling, experimental validation and observer design for a capacitively actuated microcantilever
Publication TypeConference Paper
Year of Publication2003
AuthorsBamieh B, Turner K, Napoli M
Conference NamePROCEEDINGS OF THE AMERICAN CONTROL CONFERENCE
PublisherAAC