Analysis of the Impact of Release Area on the Quality Factor of Contour-Mode Resonators by Laser Doppler Vibrometry

TitleAnalysis of the Impact of Release Area on the Quality Factor of Contour-Mode Resonators by Laser Doppler Vibrometry
Publication TypeConference Paper
Year of Publication2015
AuthorsTurner K, Qalandar K, Piazza G, Cassella C, Gibson B
Conference NameIEEE International Frequency Control Symposium
PublisherIEEE