PASSIVATED ELECTRODE ACTUATOR WITH STABLE RESONANCE AMPLITUDE

TitlePASSIVATED ELECTRODE ACTUATOR WITH STABLE RESONANCE AMPLITUDE
Publication TypeConference Paper
Year of Publication2009
AuthorsBahl G., Turner K.L, Hartwell P.G, DeMartini B.E, Walmsley R.G
Conference NameProceedings IEEE Micro Electro Mechanical Systems
PublisherIEEE