Tailoring the nonlinear response of MEMS resonators using shape optimization

TitleTailoring the nonlinear response of MEMS resonators using shape optimization
Publication TypeJournal Article
Year of Publication2017
AuthorsShaw SW, Li LL, Turner KL, Shoshani O, Dou S, Jensen JS, B. Strachan S, Polunin PM
JournalAPPLIED PHYSICS LETTERS
Volume110
Date PublishedFEB 20