Enhancement in CMOS-MEMS Resonator for High Sensitive Temperature Sensing

TitleEnhancement in CMOS-MEMS Resonator for High Sensitive Temperature Sensing
Publication TypeJournal Article
Year of Publication2017
AuthorsTurner KL, Zaghloul ME, Goktas H
JournalIEEE SENSORS JOURNAL
Volume17
Pagination598-603
Date PublishedFEB 1